Microsystem design / Stephen D. SenturiaElektrische omzettingen / M.J. HoeijmakersElektrische aandrijving voor zware toepassingen / A.H. KoetzierMaterials & process integration for MEMS / ed. by Francis E.H. TayOptimal synthesis methods for MEMS / G.K. AnanthasureshElektrische omzettingen / M.J. Hoeijmakers ; tek.: H. PalingOpgaven en uitwerkingen bij Elektrische omzettingen / M.J. Hoeijmakers ; tek.: H. PalingMEMS generated and AFM-based surface modification / Szabolcs DeladiMEMS generated and AFM-based surface modification / Szabolcs DeladiElectrostatic microactuators fabricated by vertical trench isolation technology / Edin SarajlicElectrostatic microactuators fabricated by vertical trench isolation technology / Edin SarajlicBioMEMS / ed. by Gerald A. UrbanMechatronics : dynamics of electromechanical and piezoelectric systems / by A. PreumontCharacterization, modeling and control of the →m⇋walker : a micro actuator for data storage / Mihail PǎtraşcuA six degrees of freedom MEMS manipulator / Boudewijn Ruben de JongCharacterization, modeling and control of the [micro]walker : a micro actuator for data storage / Mihail PatrascuA six degrees of freedom MEMS manipulator / Boudewijn Ruben de JongUnleashed microactuators : electrostatic wireless actuation for probe-based data storage / Anne-Mink HoexumDesign principles for six degrees-of-freedom MEMS-based precision manipulators / Dannis Michel BrouwerDesign principles for six degrees-of-freedom MEMS-based precision manipulators / Dannis Michel BrouwerComprehensive microsystems / ed. by Yogesh B. Gianchandani, Osamu Tabata, Hans ZappeDevelopment of a gas microvalve based on fine- and micromachining / Imran FazalElektrische omzettingen / M.J. Hoeijmakers ; tek.: H. PalingComprehensive microsystems / Yogesh B. GianchandaniComprehensive microsystems / Yogesh B. GianchandaniComprehensive microsystems / Yogesh B. GianchandaniComprehensive microsystems / ed. by Yogesh B. Gianchandani, Osamu Tabata, Hans ZappeAdvanced controllers for electromechanical motion systems / Nguyen Duy CuongAdvanced controllers for electromechanical motion systems / Nguyen Duy CuongExplosive micro-bubble actuator / Dennis Micha van den BroekDegradation of RF MEMS capacitive switches / Roelof Willem HerfstExplosive micro-bubble actuator / Dennis Micha van den BroekMEMS-based storage devices : integration in energy-constrained mobile systems / Mohammed Ghiath KhatibNanosystems design and technology / Giovanni de Micheli ... [et al.]Cold gas micro propulsion / Marcus Cornelis LouwerseMicromachined dense palladium electrodes for thin-film solid acid fuel cells / Sandeep UnnikrishnanMicromachined dense palladium electrodes for thin-film solid acid fuel cells / Sandeep UnnikrishnanOptimization of comb-drive actuators : nanopositioners for probe-based data storage and musical MEMs / Johannes Bernardus Charles EngelenOptimization of comb-drive actuators : nanopositioners for probe-based data storage and musical MEMs / Johannes Bernardus Charles EngelenCollected papers ; 1989-1998 / Jan H.J. Fluitman