Electrostatic microactuators fabricated by vertical trench isolation technology / Edin Sarajlic
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Electrostatic microactuators fabricated by vertical trench isolation technology / Edin Sarajlic
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<http://doc.utwente.nl/50764>
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Proefschrift Universiteit Twente, Enschede
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Electrostatic microactuators fabricated by vertical trench isolation technology
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Electrostatic microactuators f ...... ion technology / Edin Sarajlic