Materials & process integration for MEMS / ed. by Francis E.H. Tay
mainEntity
Materials & process integration for MEMS / ed. by Francis E.H. Tay
associatedMedia
<http://catdir.loc.gov/catdir/enhancements/fy0821/2002031635-d.html>
<http://catdir.loc.gov/catdir/toc/fy035/2002031635.html>
<http://www.loc.gov/catdir/enhancements/fy0821/2002031635-d.html>
<http://www.loc.gov/catdir/toc/fy035/2002031635.html>
contributor
inLanguage
isPartOf
isbn
1402071752
mainEntityOfPage
name
Materials & process integration for MEMS
numberOfPages
publication
sameAs
label
Materials & process integration for MEMS / ed. by Francis E.H. Tay