Optimization of comb-drive actuators : nanopositioners for probe-based data storage and musical MEMs / Johannes Bernardus Charles Engelen
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Optimization of comb-drive actuators : nanopositioners for probe-based data storage and musical MEMs / Johannes Bernardus Charles Engelen
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<http://dx.doi.org/10.3990/1.9789036531207>
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Proefschrift Universiteit Twente, Enschede
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Optimization of comb-drive act ...... data storage and musical MEMs
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Optimization of comb-drive act ...... nnes Bernardus Charles Engelen