Development of a gas microvalve based on fine- and micromachining / Imran Fazal
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Development of a gas microvalve based on fine- and micromachining / Imran Fazal
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Proefschrift Universiteit Twente, Enschede
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9789036525718
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Development of a gas microvalve based on fine- and micromachining
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Development of a gas microvalve based on fine- and micromachining / Imran Fazal