Pre-amorphization damage in ion-implanted silicon / R.J. Schreutelkamp ... [et al.]
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Pre-amorphization damage in ion-implanted silicon / R.J. Schreutelkamp ... [et al.]
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Pre-amorphization damage in ion-implanted silicon
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Pre-amorphization damage in ion-implanted silicon / R.J. Schreutelkamp ... [et al.]