Doi, Toshiro K. et al. Advances in CMP/Polishing Technologies for the Manufacture of Electronic Devices. Oxford; Waltham, MA: Elsevier, 2012.

Doi, Toshiro K. et al. Advances in CMP/Polishing Technologies for the Manufacture of Electronic Devices. Oxford; Waltham, MA: Elsevier, 2012.