Cavanagh, John F. and Paul A. Cavanagh. "Method for manufacturing wafers." U. S. Patent number: 4352831 A. Washington, DC: United States Patent and Trademark Office, 1982.

Cavanagh, John F. and Paul A. Cavanagh. "Method for manufacturing wafers." U. S. Patent number: 4352831 A. Washington, DC: United States Patent and Trademark Office, 1982.

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http://vocab.getty.edu/aat/source/2000079412
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Cavanagh, John F. and Paul A. Cavanagh. "Method for manufacturing wafers." U. S. Patent number: 4352831 A. Washington, DC: United States Patent and Trademark Office, 1982.

Document
http://vocab.getty.edu/aat/source/2000079412
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Cavanagh, John F. and Paul A. ...... t and Trademark Office, 1982.
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Cavanagh and Cavanagh, Method for Manufacturing Wafers (1982)
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