Spengen, W Merlijn van, Robert Puers, Ingrid De Wolf, et al. "A physical model to predict stiction in MEMS." Journal of Micromechanics and Microengineering 12/5 (2002).
Spengen, W Merlijn van, Robert Puers, Ingrid De Wolf, et al. "A physical model to predict stiction in MEMS." Journal of Micromechanics and Microengineering 12/5 (2002).
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identifier
2000061692
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2012-02-06T15:51:36
license
title
Spengen, W Merlijn van, Robert ...... Microengineering 12/5 (2002).
shortTitle
Spengen et al, Physical Model to Predict Stiction (2002)