license
identifier
contributor
created
1990-07-25T00:00:00
license
modified
2001-07-26T22:00:47
2006-01-19T14:12:12
2010-02-15T17:13:29
2010-04-23T04:46:47
2010-04-23T04:46:48
2011-01-07T17:28:38
2011-01-07T17:28:39
2012-01-20T15:05:31
2012-01-20T15:05:38
source
inDataset
broaderGeneric
broaderPreferred
displayOrder
parentString
etching ground, resist, surfac ...... erarchy name), Materials Facet
parentStringAbbrev
etching ground, resist, ... Materials Facet