license
identifier
contributor
created
1990-04-05T00:00:00
license
modified
2001-07-26T22:00:47
2010-04-23T04:05:15
2011-01-07T17:12:17
2011-01-07T17:12:18
inDataset
broaderGeneric
broaderPreferred
displayOrder
parentString
etching ground, resist, surfac ...... erarchy name), Materials Facet
parentStringAbbrev
etching ground, resist, ... Materials Facet