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46a2d93622d542b51500ee34027aea00
46a2d93622d542b51500ee34027aea00
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https://data.netwerkdigitaalerfgoed.nl/.well-known/genid/46a2d93622d542b51500ee34027aea00
Plasma chemistry of fluorocarbon RF discharges used for dry etching / Marco Haverlag
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https://data.netwerkdigitaalerfgoed.nl/.well-known/genid/46a2d93622d542b51500ee34027aea00
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08709231X
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1991-10-09
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Plasma chemistry of fluorocarbon RF discharges used for dry etching / Marco Haverlag
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