Sub-10 nm resolution electron beam lithography in ultrathin resolution HSQ resist layers / Anda Elena Grigorescu - Nederlandse Bibliografie Totaal (NBT) - Fedor - Netwerk Digitaal Erfgoed

Sub-10 nm resolution electron beam lithography in ultrathin resolution HSQ resist layers / Anda Elena Grigorescu

Sub-10 nm resolution electron beam lithography in ultrathin resolution HSQ resist layers / Anda Elena Grigorescu

http://data.bibliotheken.nl/id/nbt/p324855257

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Sub-10 nm resolution electron beam lithography in ultrathin resolution HSQ resist layers / Anda Elena Grigorescu

http://data.bibliotheken.nl/id/nbt/p324855257

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Proefschrift Technische Universiteit Delft

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en

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9789090247915

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Sub-10 nm resolution electron beam lithography in ultrathin resolution HSQ resist layers

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209

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Sub-10 nm resolution electron ...... layers / Anda Elena Grigorescu

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