High energy and high dose ion implantation : proceedings of symposium C on high energy ion implantation and symposium D on Ion beam synthesis of compound and elemental layers of the 1991 E-Mrs Spring Conference, Strasbourg, France, May 28-31, 1991 / S.U. Campisano ... [et al.]
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High energy and high dose ion implantation : proceedings of symposium C on high energy ion implantation and symposium D on Ion beam synthesis of compound and elemental layers of the 1991 E-Mrs Spring Conference, Strasbourg, France, May 28-31, 1991 / S.U. Campisano ... [et al.]
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0444894187
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High energy and high dose ion ...... bourg, France, May 28-31, 1991
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High energy and high dose ion ...... / S.U. Campisano ... [et al.]